Aurion Anlagentechnik GmbH

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

Automatic impedance matching networks (PRODIK-Series) for power range 300 W to 30 kW, Switches for up to 60 kW, modular matrixes, Power-Split for simultaneous operation from one supply, Transmission a...

Sputtering generally means to eject atoms from a solid state target by „bombarding“ it with accelerated gas ions. This technique is often used for the deposition of thin films. There is DC sputtering...

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

In cooperation with the Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, these new, very compact and cost efficient plasma sources have been developed.

The models of the AURION I...

High frequency matching networks

Application
The high frequency matching networks of the PRODIK series are used for fully automatic matching of a plasma impedance to the output impedan...

Applications

• Beam manipulation in particle acceleratos (e.g. bunch compression) 

• Tetrode based RF amp...