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Aurion Anlagentechnik GmbH

Aurion Anlagentechnik GmbH

  • DIN EN ISO 9001:2015

Aurion Anlagentechnik GmbH

  • DIN EN ISO 9001:2015

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PECVD Systems (Plasma Enhanced Chemical Vapor Deposition) by Aurion Anlagentechnik GmbH

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Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma generation methods are currently in use: Radio frequencies (40 kHz and 13.56 MHz) and microwaves. Typical gas mixtures contain oxygen, argon and sometimes hydrogen and carbontetrafluoride.

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