Aurion Anlagentechnik GmbH

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Germany
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DIN EN ISO 9001:2015

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Manufacturer
Germany
Website
Product inquiry
Phone

DIN EN ISO 9001:2015

PECVD Systems (Plasma Enhanced Chemical Vapor Deposition) by Aurion Anlagentechnik GmbH

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma generation methods are currently in use: Radio frequencies (40 kHz and 13.56 MHz) and microwaves. Typical gas mixtures contain oxygen, argon and sometimes hydrogen and carbontetrafluoride.