The KIVOS concept

KIVOS is a very flexible, modular concept for plasma systems. These systems can be used in a wide range of applications such as fine cleaning and activation of surfaces, reactive ion etching (RIE) and coating (PECVD, PVD). The concept allows AURION to manufacture highly developed products at reasonable prices. Our customers benefit from this price advantage. Another advantage is that a single system can be used for very different applications.

The basic idea behind this concept is to make as many components of a system as possible easily interchangeable. This means both interchangeable with each other and replaceable with new components, for example for a new application.

As the sketch below shows, the basic element of the process chamber is a cube-shaped stainless steel frame. Six metal plates (modules), which fulfill different functions, are attached to this frame. The modules are made of stainless steel or aluminum, depending on the application.

Due to the identical dimensions of all modules (cube shape !!!) it is possible to exchange them with each other or with other components without great effort. This means that a completely new process chamber does not have to be purchased for a slightly different application, which may only require two new flanges or a different chamber door. In some cases, it is even sufficient to replace two or three modules with one another.