Overview of our plasma technology systems

AURION Anlagentechnik GmbH offers complete system solutions for the treatment and coating of surfaces

for activation, cleaning and etching with atmospheric pressure plasma, as well as for reactive ion etching (RIE) and microwave downstream plasma
for coating by Physical Vapour Deposition (PVD, sputtering) and Plasma Enhanced Chemical Vapour Deposition (PECVD)

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