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In cooperation with the Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, these new, very compact and cost efficient plasma sources have been developed.
The models of the AURION IMAPlaS series can be used for activation and cleaning of all kinds of surfaces, in addition for removal of several materials. Therefore they are being used in wide fields of micro electronics, electronics, optics, sensor technology, medical and divers other industrial areas. They are fully integrated, ready to use systems in different configurations.