Aurion Anlagentechnik GmbH

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

Sputtering generally means to eject atoms from a solid state target by „bombarding“ it with accelerated gas ions. This technique is often used for the deposition of thin films. There is DC sputtering...

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

The RIE process (reactive ion etching) is a dry etching process used in electronic and microelectronic manufacturing. Applications are for example fast and ultra high surface cleaning, surface activat...

Automatic impedance matching networks (PRODIK-Series) for power range 300 W to 30 kW, Switches for up to 60 kW, modular matrixes, Power-Split for simultaneous operation from one supply, Transmission a...

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

Plasma is used to manage a lot of tasks in surface treatment, i.e. coating, activation of polymers, etching of micro electronic components and cleaning. For the cleaning of surfaces different plasma g...

Sputtering generally means to eject atoms from a solid state target by „bombarding“ it with accelerated gas ions. This technique is often used for the deposition of thin films. There is DC sputtering...

AURION offers multi-chamber systems with substrate handling under vacuum specifically tailored to your requirements. The available configurations include lock chambers, transfer chambers and proces...

Aurion has developed a process for sterilization and barrier coating of hollow bodies (such as PET bottles) in particular.

Compact systems, minimal footprint
- High plasma densities fo...

Automatic impedance matching networks (PRODIK-Series) for power range 300 W to 30 kW, Switches for up to 60 kW, modular matrixes, Power-Split for simultaneous operation from one supply, Transmission a...