Aurion Anlagentechnik GmbH

Manufacturer
Germany
Website
Product inquiry
Phone

DIN EN ISO 9001:2015

Company profile
Products and Services
News

Manufacturer
Germany
Website
Product inquiry
Phone

DIN EN ISO 9001:2015

Plasma Cluster Systems by Aurion Anlagentechnik GmbH

AURION offers multi-chamber systems with substrate handling under vacuum specifically tailored to your requirements. The available configurations include lock chambers, transfer chambers and process modules for sputtering and RIE processes.