Aurion Anlagentechnik GmbH

Manufacturer
Germany
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DIN EN ISO 9001:2015

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Manufacturer
Germany
Website
Send product inquiry
Phone

DIN EN ISO 9001:2015

Plasma Cluster Systems by Aurion Anlagentechnik GmbH

AURION offers multi-chamber systems with substrate handling under vacuum specifically tailored to your requirements. The available configurations include lock chambers, transfer chambers and process modules for sputtering and RIE processes.