The confocalDT IFS2407-xHT/VAC high-temperature sensors set new standards for measurements in demanding environments. The confocal chromatic sensors deliver ultra-precise measurement results at temperatures of up to 200 °C. Thanks to minimal outgassing, the sensors are also designed for use up to ultra-high vacuum (UHV) and are ideal for measurement tasks in precision machine building and the semiconductor industry.

The new confocalDT IFS2407-xHT/VAC high-temperature sensor is the first optical sensor in Micro-Epsilon's portfolio that can withstand high temperatures up to 200 °C. By dispensing with organic adhesives, the stainless steel high-temperature sensors are low-outgassing and therefore ideally suited for use up to ultra-high vacuum (UHV). The passive component design also favors measurements in a vacuum, as the sensors do not emit any heat radiation into the environment.

Versatile and highly precise

The innovative HT models are used for displacement and distance measurements on reflective and diffuse surfaces as well as for thickness measurement. The HT sensors also impress with their outstanding linearity up to < ±0.18 µm and extremely high temperature stability up to < 0.1 µm/°C. This makes the confocal chromatic sensors ideal for measurement tasks in the semiconductor and electronics industry as well as in precision machine building.

Flexible adaptation to different installation scenarios

Their compact design makes these sensors ideal for applications with limited installation space. Models with a 90° beam path are also available for an even shallower installation depth. The innovative HT sensors are available in measuring ranges of 0.8 mm, 2 mm and 4 mm and can be quickly and easily integrated into existing process lines. The sensors are compatible with the confocal chromatic IFC controllers.