Micro-Epsilon’s innovative white-light interferometers in the interferoMETER series deliver absolute, non-contact distance measurements with the highest precision. With the new IMP DS35/VAC, Micro-Epsilon is expanding its sensor portfolio with a model specifically designed for vacuum-compatible environments, including ultra-high vacuum applications. The sensor combines a large base distance of approximately 35 mm with a resolution of less than 1 nm, making it particularly suitable for demanding measurement tasks where accuracy, process stability, and integrability are critical.

Large working distance for new applications

The IMP DS35/VAC offers a measurement range of 2.1 mm with a starting measurement distance of approximately 35 mm. This enables precise distance measurements to be performed from a safe distance, for example, during position monitoring in glass wafer production or when measuring coated wafers. The large working distance also facilitates applications at low-lying or hard-to-reach measurement points. With a spot diameter of just 15 µm, even small structures can be reliably detected, while the measurement angle of ±1° ensures stable measurement results in challenging installation situations.

High precision combined with high-performance controllers

The IMP DS35/VAC features a robust stainless steel housing and is designed for use in vacuum environments down to UHV. The new sensor is available for the IMS5400 and IMS5400MP controllers, enabling resolutions of less than 1 nm and linearities of less than ±50 nm. This makes the system suitable for high-precision distance measurements in modern production and inspection processes. With the IMS5400MP controller, multipeak distance measurements can also be performed on up to 13 layers. This opens up additional possibilities for the analysis of transparent, coated, or multilayer materials.