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MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

10.07.2026 02:07

Capacitive precision for demanding environments

The capacitive displacement sensors in the capaNCDT series stand for maximum precision, stability and versatility. With resolutions down to 0.03 nm, compact design, multi-channel capability and OEM-compatible solutions, the portfolio is suitable for a wide range of applications in industry, research and development. The globally unique product range also covers extreme temperature ranges from -270 to +800 °C and offers suitable sensors for standard and special applications.

New sensors for extreme environments

With the new CSH/SE series, Micro-Epsilon is expanding its portfolio to include sensors for particularly demanding operating conditions. The series comprises 5 cylindrical sensors and 7 models with a flat design with measuring ranges from 0.2 to 5 mm. The sensors are based on the proven CSH standard models and offer an almost identical design and the same cable dimensions. At the same time, they are consistently designed for special operating conditions - from ultra-high vacuum and clean room applications to strong magnetic fields and extreme temperatures.

Developed for extreme conditions

The SE sensors cover a temperature range from -270 to +200 °C and impress with their excellent temperature stability. Their non-magnetic titanium housing makes them particularly suitable for applications close to strong magnetic fields, for example in research, cryogenics or aerospace. The integrated cable is extremely low outgassing, temperature-resistant and mechanically resilient.

Optimally prepared for vacuum and clean rooms

The SE sensors are specially cleaned before delivery for use in vacuum and cleanroom applications. The material selection is designed to minimize contamination and is optimally prepared for residual gas analyses. This makes the sensors suitable for ultra-high vacuum applications up to 10-10 mbar, for example in particle accelerators, semiconductor plants or chemical vapor deposition processes.

New gap sensors for greater integration freedom

In addition to the SE sensors, Micro-Epsilon is also expanding its portfolio of capacitive gap sensors. The new models CSG-0.5/CRg2.0, CSG-1/CRg2.0 and CSG-1/90/CRg2.0 offer a significantly more compact design than previous CSG sensors. The CSG-1/90/CRg2.0 model also demonstrates the high adaptability of the sensors thanks to a laterally extending measuring surface. This allows precise gap measurements to be reliably realized even in particularly limited installation spaces. In line with the portfolio expansion, the revamped capaNCDT catalog has been published with new content, illustrations and visualizations.

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