The new confocalDT IFS2407-xHT/VAC high-temperature sensor is the first optical sensor in Micro-Epsilon's portfolio that can withstand high temperatures of up to 200 °C. By dispensing with organic adhesives, the high-temperature sensors made of stainless steel are low outgassing and therefore ideally suited for use up to ultra-high vacuum (UHV). The passive component design also favors measurements in a vacuum, as the sensors do not emit any heat radiation into the environment.

Versatile and highly precise

The innovative HT models are used for displacement and distance measurement on reflective and diffuse surfaces as well as for thickness measurement. The HT sensors also impress with their outstanding linearity of up to < ±0.18 µm and extremely high temperature stability of up to < 0.1 µm/°C. This makes the confocal chromatic sensors ideal for measuring tasks in the semiconductor and electronics industry as well as in precision mechanical engineering.

Flexible adaptation to installation situations

Thanks to their compact design, the sensors are ideal for applications with limited installation space. Models with a 90° beam path are also available to further reduce the installation space. The innovative HT sensors are available in measuring ranges of 0.8 mm, 2 mm and 4 mm and can be easily and quickly integrated into existing process systems. The sensors are compatible with the confocal chromatic IFC controllers.