The Micro-Epsilon absolute interferometers set new standards in high-precision distance measurement. The new IMP-DS10/90/VAC miniature sensor is designed for use in a vacuum and allows space-saving integration thanks to its 90 degree beam path. The sensor is compatible with the interferoMETER IMS5400 or IMS5600 controllers.

The interferoMETER 5400-DS and 5600-DS absolute interferometers are used for distance measurement with nanometer accuracy. The product group has now been expanded to include new sensors with a large base distance of 10 mm. These are designed for high-precision applications in clean room environments and in a vacuum, for example for measurements on coated wafers. A non-magnetic titanium UHV version also enables use in strong magnetic fields such as those found in medical technology in nuclear spin or electron beam microscopes.

The design with a 90° beam path reduces the required installation depth enormously. Depending on the choice of controller, linearities of < ±50 nm or < ±10 nm are possible. For optimum integration into various control systems and production programs, the innovative absolute interferometers have extensive connection options. They include digital interfaces such as Ethernet, EtherCAT, RS422, PROFINET and EtherNet/IP as well as an analog output. The entire configuration of the controller and its sensors takes place as usual via the web interface without additional software.