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Bronkhorst High-Tech BV

Bronkhorst High-Tech BV

  • DIN EN ISO 9001:2015
  • DIN EN ISO 14001:2015
  • ISO/IEC 17025:2017

Bronkhorst High-Tech BV

  • DIN EN ISO 9001:2015
  • DIN EN ISO 14001:2015
  • ISO/IEC 17025:2017

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Mass Flow Meters / Controllers (EL-FLOW® METAL SEALED ) by Bronkhorst High-Tech BV

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Metal Sealed Gas Mass Flow Meters

Bronkhorst® model F-111CM Mass Flow Meters (MFMs) designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. The F-111CM is suited for precise measurement of flow ranges between 0.12…6 sccm up to 1…50 slm (based on N2) at operating pressures between vacuum and 1500 psig (100 bar).

EL-FLOW® Metal Sealed series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP or FLOW-BUS protocols. The EL-FLOW® Metal Sealed design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

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