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MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

10.08.2025 01:08

State-of-the-art capacitive product portfolio

The new capaNCDT CS-x capacitive sensors are extremely temperature-stable and measure with a resolution of up to 0.19 nm. As they can be combined with all available controllers and cables, they offer maximum flexibility for applications in industry and semiconductor machine construction. There are seven new sensors available in measuring ranges from 0.25 to 10 mm, which can be used at temperatures from -50 to +200 °C.

Advantages:

  • Robust and high-resolution
  • extremely temperature-stable with -0.015 µm/K
  • Easy integration into existing systems

The capaNCDT series from Micro-Epsilon offers the world's most advanced product portfolio of capacitive sensors. These sensors measure displacement, distance and position in industrial environments in measuring ranges from 50 µm to 10 mm. In addition to the high precision with a resolution of up to 0.03 nm and a linearity from 0.1 µm, the high flexibility that enables a combination of controllers, sensors and cables is also unique.

These capacitive sensors are also extremely temperature-stable and can be used in harsh industrial environments at temperatures from -270 to +200 °C. The extensive sensor portfolio includes more than 30 standard sensors, but also the option of adapting the sensors to special requirements at any time. Modern interfaces such as Ethernet, EtherCAT and PROFINET ensure quick and easy connection to existing systems.

New: Seven particularly temperature-stable sensors from the CS-x series

Seven new sensors from the capaNCDT CS-x series have been added to the product portfolio with immediate effect. They measure in ranges from 0.25 to 10 mm. The sensor design in particular is a key element that has a significant impact on the high temperature stability. The models are made of robust stainless steel and are fully pluggable. They also have a defined clamping range. This allows temperature-related expansions of the housing to be reproducibly compensated. In conjunction with the powerful controllers, these sensors achieve maximum precision with a resolution of up to 0.19 nm and a linearity of up to 0.25 µm. They can be used at temperatures from -50 to +200 °C.

Thanks to their outstanding properties, these sensors precisely measure displacement, distance, position and thickness in industrial production. When installed in machines, they monitor travel paths and tool positions, for example. Their special sensor properties also make them ideal for use in vacuum environments or clean rooms. For special applications with strong magnetic fields such as superconducting magnets, Micro-Epsilon offers sensor cables made of non-magnetic materials such as titanium or stainless steel.

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