MICRO-EPSILON Messtechnik GmbH & Co. KG

Manufacturer
Germany
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Manufacturer
Germany
Send request

07.07.2024 01:07

Absolute interferometer: New vacuum sensors with 90° beam path

The interferoMETER 5400-DS and 5600-DS absolute interferometers are used for distance measurement with nanometer accuracy. The product group has now been expanded to include new sensors with a large base distance of 10 mm. These are designed for high-precision applications in clean room environments and in a vacuum, for example for measurements on coated wafers. A non-magnetic titanium UHV version also enables use in strong magnetic fields such as those found in medical technology in nuclear spin or electron beam microscopes.

The design with a 90° beam path reduces the required installation depth enormously. Depending on the choice of controller, linearities of < ±50 nm or < ±10 nm are possible. For optimum integration into various control systems and production programs, the innovative absolute interferometers have extensive connectivity options. They include digital interfaces such as Ethernet, EtherCAT, RS422, PROFINET and EtherNet/IP as well as an analog output. The entire configuration of the controller and its sensors is carried out as usual via the web interface without additional software.