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MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

MICRO-EPSILON Messtechnik GmbH & Co. KG

19.09.2023 00:09

Confocal chromatic sensors for use in a vacuum

The high-performance product portfolio of confocal chromatic sensors has been expanded to include additional vacuum-compatible models. The sensors of the IFS2406-10/Vac(001) series with 10 mm measuring range and IFS2405-28/Vac(001) with 28 mm measuring range are now available. While the IFS2405-28/Vac(001) has a large base distance and thus enables measurements from a large distance to the target, the IFS2406-10/Vac(001) features a small diameter combined with a large measuring range.

Configure your confocal sensor



IFD2410-1 - Confocal chromatic sensor system with integrated controller
Micrometer-precise measurement of distance and thickness
Measuring range 1 mm | Resolution 12 nm | Light spot diameter 12 µm
Numerical aperture 0.45

IFD2411-1 - Compact confocal measuring system
Ideal for distance and thickness measurements
Measuring range 1 mm | Resolution 12 nm | Light spot diameter 12 µm
Numerical aperture 0.45

IFS2403/90-1,5 - Confocal chromatic hybrid sensor ø8 mm with radial beam path
Ideal for accurate distance measurements on smooth & reflective surfaces
Measuring range 1.5 mm | Resolution 60 nm | Light spot diameter 15 µm
Numerical aperture 0.3 | Max. Measuring angle ± 16° | Sensor diameter 8 mm

IFS2403-1.5 - Confocal chromatic hybrid sensor ø8 mm
Ideal for accurate distance measurements on smooth & reflective surfaces
Measuring range 1.5 mm | Resolution 60 nm | Light spot diameter 15 µm
Numerical aperture 0.3 | Max. Measuring angle ± 16° | Sensor diameter 8 mm

IFS2404/90-2 - Confocal chromatic compact sensor ø12 mm with radial beam path
Ideal for high resolution distance measurements on all surfaces, also structured & glossy
Measuring range 2 mm | Resolution 40 nm | Light spot diameter 10 µm
Numerical aperture 0.25 | Max. Measuring angle ± 12° | Sensor diameter 12 mm

IFS2404-2 - Confocal Chromatic Compact Sensor ø12 mm
Ideal for high resolution distance measurements on all surfaces, also structured & shiny
Measuring range 2 mm | Resolution 40 nm | Light spot diameter 10 µm
Numerical aperture 0.25 | Max. Measuring angle ± 12° | Sensor diameter 12 mm

IFS2405-1 - Precise confocal chromatic sensor
Ideal for high resolution distance measurements on all surfaces, also structured & glossy
Measuring range 1 mm | Resolution 28 nm | Light spot diameter 8 µm
Numerical aperture 0.55 | Max. Measuring angle ± 30° | Sensor diameter 27 mm

IFS2405-3 - Precise confocal chromatic sensor ideal for high resolution distance measurements on all surfaces, also structured & glossy
Measuring range 3 mm | Resolution 36 nm | Light spot diameter 9 µm
Numerical aperture 0.45 | Max. Measuring angle ± 24° | Sensor diameter 34 mm

IFS2406/90-2,5/VAC(001) - Precise confocal chromatic sensor with radial beam path, vacuum compatible
Ideal for high resolution distance measurements on all surfaces, also structured & shiny
Measuring range 2.5 mm | Resolution 24 nm | Light spot diameter 10 µm
Numerical aperture 0.3 | Max. Measuring angle ± 16° | Sensor diameter 20 mm

IFS2406-2,5/VAC(003) - Precise confocal chromatic sensor, vacuum compatible
Ideal for high resolution distance measurements on all surfaces, also structured & shiny
Measuring range 2.5 mm | Resolution 24 nm | Light spot diameter 10 µm
Numerical aperture 0.3 | Max. Measuring angle ± 16° | sensor diameter 20 mm

IFS2407-3 - High precision confocal chromatic sensor
Ideal for high resolution distance and roughness measurements on all surfaces, also structured & glossy
Measuring range 3 mm | Resolution 20 nm | Light spot diameter 9 µm
Numerical aperture 0.43 | Max. Measuring angle ± 30° | Sensor diameter 54 mm

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