Three new sensors in the interferoMETER IMP-DS series are designed for high-precision distance measurements in special environments. These sensors and their cables are highly particle-free and can be used both in clean rooms and in a vacuum. They deliver results in the sub-nanometer range and are available in different versions: for 90° measurements in bores and small installation spaces, for use in ultra-high vacuum with high temperature stability and as a miniaturized distance sensor with a diameter of just 4 mm.

With the interferoMETER series, Micro-Epsilon offers innovative white light interferometers for industrial distance and thickness measurement with maximum accuracy. In contrast to laser interferometers, absolute distance measurements can be carried out even with signal jumps. Resolutions down to the picometer range can be achieved.

New sensors with different designs and properties are available for integrating the interferometers into demanding environments. The IMP-DS0.5/90/VAC can also be mounted in flat installation spaces thanks to its 90° beam path. The new IMP-DS1/VAC miniature sensor is one of the smallest optical sensors from Micro-Epsilon. With a diameter of 4 mm and an integrated cable, the sensor can also be used in extremely confined installation spaces. Sensors and cables can be used both in clean rooms and in a vacuum.