MICRO-EPSILON Messtechnik GmbH & Co. KG

Manufacturer
Germany
Company contact

Manufacturer
Germany
Company contact

23.08.2023 01:08

Precise notch detection on the glass wafer

To produce high-quality semiconductor chips, precise alignment and positioning techniques are required in the production of glass wafers. A crucial step in this process is notch detection, in which the positions of the notches on the wafer are precisely recorded. These notches serve as reference points for subsequent processing and handling steps.

optoCONTROL CLS1000 fiber optic sensors are used for precise notch detection. These state-of-the-art sensors detect the exact position of the notches on the glass wafer and thus enable extremely reliable alignment. The CLS1000 sensors impress with their high resolution and accuracy in measuring positions and distances. They are also characterized by their compact design, easy integration and high reliability. Thanks to their performance, they are an essential support for the production of semiconductor chips on glass wafers.

Advantages at a glance

High resolution and accuracy for precise position sensing
Fast response time at up to 10 kHz and a response time of 100µs
Easy integration even into existing systems
Vacuum compatible sensor heads

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