MICRO-EPSILON Messtechnik GmbH & Co. KG

Manufacturer
Germany
Company contact

Manufacturer
Germany
Company contact

30.06.2023 00:06

interferoMETER: Powerful sensors for special requirements

With the interferoMETER series, Micro-Epsilon offers innovative white light interferometers for industrial distance and thickness measurement with the highest accuracy. In contrast to laser interferometers, absolute distance measurements can be carried out even with signal jumps. Resolutions down to the picometer range are realized. Three new sensors are available for high-performance measurements in special environments.

interferoMETER IMP-DS0,5/90/VAC
90° distance sensor for small installation spaces Measuring range 1.5 mm Linearity ±10 nm (depending on controller) Radial beam exit Versionfor vacuum applications up to UHV

interferoMETER IMP-DS19/VAC(001)
Sensor with highest temperature stability Measuring range 2.1 mm Linearity ±10 nm (depending on controller) Sensor material made of Invar Version for vacuum applications up to UHV

interferoMETER IMP-DS1/VAC
Miniaturized distance sensor ø4mm Measuring range 1.1 mm Linearity ±10 nm (depending on controller) Integrated cable for easy installation Version for vacuum applications up to UHV