Robust miniature pressure controllers

Extension of IQ + FLOW® series with media-isolated sensors

Bronkhorst’s IQ+FLOW series of miniature mass flow and pressure meters and controllers is widely
used by equipment manufacturers in the analytical, biotechnology and life science market. Due to
the application of chip sensors and mini-valves the footprint of single channel instruments is only
20 x 40 mm. This is a great advantage for manufacturers of desktop equipment, who are always
looking for optimal space efficiency.

The IQ+FLOW product line has now been extended with pressure instruments with media-isolated
pressure sensors. The sensor chip is protected by a stainless-steel diaphragm and oil-filled
compartment. With this new option, the instruments can handle a much wider variety of media
than before, including thin gases such as hydrogen and helium. According to the requirements of
the aforementioned markets, the instruments have low-outgassing and clean wetted parts.

IQ+FLOW series are available in three configurations: single channel versions for either inline or
topmount integration and multi-channel versions. Compact 2- or 3-channel instruments can be
configured on customer specification to measure or control the mass flow and/or the upstream or
downstream pressure in a system

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