Stäubli Electrical Connectors AG

Manufacturer
Switzerland
Website
Product inquiry
Phone

DIN EN ISO 9001

Manufacturer
Switzerland
Website
Product inquiry
Phone

DIN EN ISO 9001

Cleanroom robots for semiconductor technology by Stäubli Electrical Connectors AG

Our cleanroom robot solutions combine precision, speed and cleanliness

In terms of precision and speedcombined with reduced particle contamination, electronics and semiconductor manufacturing place high demands on automation. Stäubli cleanroom robots allow the realization of highly efficient solutions. Our robots can handle silicon wafers, FOUPs/cassettes as well as photomasks and panels with exceptionally high precision and speed and with low-vibration movements throughout the semiconductor manufacturing value chain.

Designed specifically for the semiconductor industry

The specially developed Supercleanroom (SCR) six-axis robots are designed to meet the stringent requirements of cleanroom environments. They comply with ISO 14644-1 Class 2/3 or FED209E Subclass 1 standards. The machines feature a fully encapsulated arm made of polyurethane with a special coating and boast impressive maneuverability in confined spaces. Stäubli's SCR robots offer more flexibility, a higher payload and a longer reach compared to other robots for wafer production. As a result, they meet all requirements for handling wafers, photomasks and cassettes. Thanks to the small footprint of the robots, valuable installation space can be saved in the special machines.