With the new Multipeak versions, high-precision detection of multiple transparent layers in just one measurement process is now also possible. Two controller models are available for multipeak distance measurement (IMS5x00-DS/MP) or multilayer thickness measurement (IMS5400-TH/MP). The two system variants differ in that the layer thicknesses are calculated from the respective distance values for the distance systems and measured directly for the thickness system. Depending on the application, you thus benefit from different advantages:

Systems for multi-peak distance measurement are used in particular for alignment and positioning tasks where a distance is to be measured and a thickness determined at the same time. In a large measuring range of 2.1 mm, up to 13 layers with minimum thicknesses down to 10 µm (BK7) can be detected. In relation to the accuracy, the measurement is carried out from a large distance of around 19 mm. Thanks to the absolute measurement, the system does not have to be referenced even after a signal interruption, for example in the case of steps or edges.

Systems for multi-layer thickness measurement are always used when distance-independent thickness values for up to 5 layers are required. In the thickness measuring range of 2.1 mm, single layers up to 35 µm (BK7) are measured with process stability. Distance fluctuations of the measured object are compensated by the large working range, so that vibrations or other material movements have no influence on the measurement. Another advantage of the thickness systems is the large base distance: Measurements are taken from up to 70 mm away from the target, which provides process reliability and protects against damage to the sensor.

A modern and intuitive web interface for easy system configuration is available for all systems. In addition, the versatile interfaces (EtherCAT, Ethernet, PROFINET, EtherNet/IP, RS422, analog) offer numerous integration options. For industrial use, the interferometer sensors are equipped with high IP65 protection. Vacuum compatible systems are also available as an option.

Advantages of the white light interferometers

• Best-in-class resolution <30 pm
• Linearity down to ±10 nm for nanometer precision
• Distance-independent thickness measurements
• Up to 13 layers with minimum thicknesses down to 10 µm can be measured
• Robust system for process stable measurement results
• Large distance to the target at 2.1 mm measuring range
• Pilot laser visualizes measuring point and provides optical feedback on measuring position